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IMT 19-2023 Master Thesis: Devices based on MEMS technology for gas sensing applications


Institut für Mikrostrukturtechnik (IMT)

Ihre Aufgaben

For this project, we are looking for an enthusiastic, ambitious and motivated student with interest in exploiting methods of MEMS, in particular RIE and bulk/surface micromachining. The overarching goal of this project will be to produce a MEMS platform, which will allow for chemical gas sensing to toxic gases.

The specific tasks within the project will be:

  • design and fabricate MEMS platform arrays;
  • synthesizing various gas-sensitive materials for toxic gases;
  • Testing the devices at gas environment.

During the Master thesis, you will get hands-on experience on, cleanroom fabrication, morphological and structural characterization (XRD, SEM), gas sensing test station, having the opportunity to get exposure to a wide range of instruments and techniques.

You will be integrated in the other teams of IMT and within this project, you will use the infrastructure existent at the Institute of Microstructure Technology (IMT), i.e., microfabrication facilities and micro-characterization equipment. This is a complete project, offering the possibility to fabricate and test the devices, giving you the opportunity to co-author conference and/or journal publications.


by appointment

Ihre Qualifikation

  • Field of study: Mechanical/electrical and chemical engineering
  • Good academic record (marks); curious about various aspects of science
  • Enthusiastic to work in a multidisciplinary environment
  • Independent thinker and team player
  • In particular: strong interest Micro-electromechanical systems (MEMS) process such as Reactive ion etching (RIE), bulk/surface micromachining, gas sensor applications
  • Knowledge in microfabrication, clean room experience, solid works, AutoCAD is desirable

Contract duration

limited for 6-9 months

Contact person in line-management

For further information, please contact Dr. Bharat Sharma, phone +49 721 608-29312, e-mail:

Bitte bewerben Sie sich online über den unten stehenden Button für die Ausschreibungsnummer IMT 19-2023.

Ausschreibungsnummer: IMT 19-2023

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