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IMT 16-2023 Master Thesis: High entropy alloys for MEMS based gas sensing applications


Institut für Mikrostrukturtechnik (IMT)

Ihre Aufgaben

For this project, we’re seeking a passionate and research-driven individual, who holds a strong interest in alloy design and application to gas sensors based on Micro-Electromechanical Systems (MEMS). The project primarily focuses on developing an entropy-modified alloy, a so-called high entropy alloy (HEA) that can serve as a sensitive layer of MOSFET gas sensor platforms, for detecting toxic gases and biomarkers in our environment. A significant emphasis of this project is the application of HEAs in the MEMS FET gas sensor design, thus, an interest in these unique alloys would be highly beneficial.

The specific tasks of this project are:

  • Designing and fabricating MEMS platform arrays that incorporate HEAs.
  • Synthesizing gas-sensitive materials, including HEAs, which are capable of detecting various toxic gases.
  • Testing the performance and efficiency of these devices in different gas environments.

Throughout your master’s thesis, you will gain valuable hands-on experience with cleanroom fabrication techniques, which are essential in producing MEMS arrays. Additionally, you will conduct morphological and structural characterizations of HEAs and MEMS devices, using instruments such as X-Ray Diffraction (XRD) and Scanning Electron Microscopy (SEM).

You will also have the opportunity to work with a gas sensing test station, enabling you to test and optimize the gas detection efficiency of the MEMS FET gas sensors. This hands-on experience and exposure to a wide range of instruments and techniques will help to broaden your practical knowledge and technical skills. You will be part of the team at the Institute of Microstructure Technology (IMT), where you will have access to the established infrastructure, including microfabrication facilities and characterization equipment. This comprehensive project will allow you not only to design and create the devices but also test their performance, providing you with a well-rounded experience in the field. This work could potentially lead to co-authorship opportunities in conference and/or journal publications.


by appointment

Ihre Qualifikation

  • Field of study: Mechanical/electrical/Material and chemical engineering
  • good academic record (marks); curious about various aspects of science
  • enthusiastic to work in a multidisciplinary environment
  • independent thinker and team player
  • basic knowledge of alloy metallurgy
  • Ability to plan, organize, and prioritize tasks to efficiently manage time and meet deadlines
  • in particular: strong interest Micro-electromechanical systems (MEMS) process such as Reactive ion etching (RIE), bulk/surface micromachining, gas sensor applications
  • knowledge in microfabrication, clean room experience, solid works, AutoCAD is desirable

Contract duration

limited for 6-9 Months

Contact person in line-management

For further information, please contact Dr. Bharat Sharma, phone +49 721 608-29312, e-mail:

Bitte bewerben Sie sich online über den unten stehenden Button für die Ausschreibungsnummer IMT 16-2023.

Ausschreibungsnummer: IMT 16-2023

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