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IMT 31-2022 Bachelor or Master Thesis: Shape memory microactuators in silicon technology


Institut für Mikrostrukturtechnik (IMT)


The Institute for Microstructure Technology (IMT) develops micro- and nanoactuators using smart materials. Among the class of smart materials are shape memory alloys (SMAs) which show multifunctional properties including the shape memory effect, thermal and structural effects. This enables the development of novel bi-stable actuators on the micro- and nanometer length scale, which are of special interest for applications in small space, e.g., in micro optics, photonics and micro robotics.

The aim of this Bachelor/Master thesis is to develop, fabricate and characterize SMA-based microactuators using cleanroom techniques. Your tasks:

  • CAD and numerical simulations (COMSOL multiphysics)
  • Characterization of SMA material properties (structure, mechanical, thermal)
  • Micro- and nanofabrication of functional devices using clean room technology (electron beam lithography, reactive ion etching). This work will be supported by experienced cleanroom staff.
  • Experimental characterization of actuator performance

The focus of the work can be tailored to the applicant's interests and competencies. IMT has extensive state-of-the-art equipment (600 m² clean room with fully equipped technologies, rapid prototyping processes such as 3D printing and laser cutting, assembly and joining technology laboratories, various metrological laboratories). Intensive support ensures that the work can be carried out within the given time frame.


on appointment

Persönliche Qualifikation

  • Field of study: Mechanical/electrical engineering, microsystems technology, physics
  • We are looking for ambitious, creative and self-motivated individuals, who like to work in a multidisciplinary and international team.
  • Basic knowledge in micro-/nanotechnology is desirable; knowledge in FEM simulation (COMSOL) is advantageous

Contract duration

3 / 6 months

Contact person in line-management

For further information, please contact Gowtham Arivanandhan, phone +49 721 608-22786, email:

Bitte bewerben Sie sich online über den unten stehenden Button für die Ausschreibungsnummer IMT 31-2022.

Ausschreibungsnummer: IMT 31-2022

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